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PROCESS FOR PRODUCING ORGANICALLY MOFIFIED OXIDE, OXYNITRIDE OR NITRIDE LAYERS BY VACUUM DEPOSITION
PROCESS FOR PRODUCING ORGANICALLY MOFIFIED OXIDE, OXYNITRIDE OR NITRIDE LAYERS BY VACUUM DEPOSITION
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机译:通过真空沉积生产有机改性的氧化物,氧化氮或氮化层的方法
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摘要
According to the invention, in plasma-activated high-rate evaporation of an oxide former, monomers are applied in addition to oxygen in such a way that the evaporated oxide formers and the oxygen and the monomers have a preferential direction on the substrate and pass through a high-density plasma zone. More than 50 wt % of the coating on the substrate consists of inorganic molecules and under 50 wt % of partially cross-linked organic molecules. The process is used for packaging, window glazing, mirrors, decorative surfaces or façade linings.
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