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The torsional vibration detection device and torsional vibration detection manner of the silicon monocrystal and production manner null of the monocrystal which uses
The torsional vibration detection device and torsional vibration detection manner of the silicon monocrystal and production manner null of the monocrystal which uses
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机译：硅单晶的扭转振动检测装置及扭转振动检测方式及使用的单晶的制造方式无效
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摘要
PROBLEM TO BE SOLVED: To provide the production method of silicon single crystal which prevents polycrystallization of single crystal and breakage and fall from a neck part. ;SOLUTION: This detector is provided with a camera 3 disposed in the outside of a silicon single crystal growth chamber and for detecting rotation of a crystal in the chamber, a memory 22 for processing a signal from the camera 3 and storing it, and an operation processor 21 for comparing the signal from the camera 3 with another signal of the memory 22 and discriminating production of abnormal oscillation of a single crystal 6. In addition, in a method for detecting the abnormal oscillation of a silicon single crystal, it is judged that the abnormal oscillation is produced in the single crystal when a deviation between a time interval of a signal newly output from the detector and its average value exceeds a specified value. The discrimination signal of the abnormal oscillation obtained from the above-mentioned value is input to a silicon rotation driver 12, and its revolving speed is changed, so that the abnormal oscillation can be avoided.;COPYRIGHT: (C)1997,JPO
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