首页> 外国专利> Procedure for the fabrication and the calibration of a nanometer length scale for technical equipment for the purpose of giving precise or ultraprecise images of structures

Procedure for the fabrication and the calibration of a nanometer length scale for technical equipment for the purpose of giving precise or ultraprecise images of structures

机译:用于提供技术设备的精确度或超精密度图像的技术设备的纳米级刻度尺的制造和校准程序

摘要

The method uses two different crystalline or non-crystalline materials (A, B) which have contrasting images clearly distinguishable from each another. These are formed into a heterogeneous series of layers carried on a substrate. The series is then subjected to experimental microscopic analysis from which the thickness and structure of each layer can be determined. This will form a scale in the nanometric range. The greater the number of layers, the more accurate the scale will be.
机译:该方法使用两种不同的晶体或非晶体材料(A,B),它们具有明显可彼此区分的对比图像。这些形成为衬底上承载的异质系列层。然后对该系列进行实验显微镜分析,由此可以确定每一层的厚度和结构。这将形成纳米范围内的规模。层数越大,缩放比例越精确。

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