Self-aligned amorphous silicon thin film transistor using microcrystalline silicon containing chlorine and its manufacturing method

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  机译： 以非晶硅/以氯为活性层的非晶硅多层膜的薄膜晶体管的结构和制造方法

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  机译： 能够扩散非晶硅膜域中的结晶催化剂颗粒的非晶硅膜的结晶方法和薄膜晶体管的制造方法

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  机译： 自对准非晶硅薄膜晶体管的制造方法

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