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the courage to get wet on the end point of the device in test method
the courage to get wet on the end point of the device in test method
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机译：在测试方法中勇于在设备终点上弄湿的勇气
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摘要
The present invention relates to a method for measuring the end point of a wet etch, which comprises the steps of: supplying a solution of etchant into a container; Measuring the amount of PH change in the etch solution while the wet-etcher is performed; Calculating a thickness change amount of the material to be etched by using the PH change amount; And determining the state as an etch-end point when the calculated thickness variation reaches the preset thickness variation value.
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