(AlN) (SiC)1-x (AlN)x by sublimation method. SUBSTANCE: method for production of epitaxial layers of solid solutions (SiC) (SiC)4-x(AlN)x (AlN) (SiC)1-x (AlN)x consists in that sublimation is conducted from the source in form of polycrystalline sinter SiC+AlN with the following amounts of components mas.%:SiC 20-80; the balance AlN. Method provides perfect layers of preset composition within the interval x=0.35-0.9. EFFECT: lower costs of the process. 1 dwg"/>
METHOD FOR PRODUCTION OF EPITAXIAL LAYERS OF SOLID SOLUTIONS (SiC) (SiC)<Sub>4-x</Sub>(AlN)<Sub>x</Sub> (AlN) (SiC)<Sub>1-x</Sub> (AlN)<Sub>x</Sub>
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METHOD FOR PRODUCTION OF EPITAXIAL LAYERS OF SOLID SOLUTIONS (SiC) (SiC)4-x(AlN)x (AlN) (SiC)1-x (AlN)x
METHOD FOR PRODUCTION OF EPITAXIAL LAYERS OF SOLID SOLUTIONS (SiC) (SiC)4-x(AlN)x (AlN) (SiC)1-x (AlN)x
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机译：制备固溶体（SiC） 4-x （AlN） x （AlN）（SiC） 1-x 的外延层的方法子>（AlN）<子> x
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FIELD: production of epitaxial layers of solid solutions (SiC) (AlN) (SiC)1-x (AlN)x by sublimation method. SUBSTANCE: method for production of epitaxial layers of solid solutions (SiC) (SiC)4-x(AlN)x (AlN) (SiC)1-x (AlN)x consists in that sublimation is conducted from the source in form of polycrystalline sinter SiC+AlN with the following amounts of components mas.%:SiC 20-80; the balance AlN. Method provides perfect layers of preset composition within the interval x=0.35-0.9. EFFECT: lower costs of the process. 1 dwg
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机译：领域：固溶体（SiC）外延层的生产<图像文件=“ 00000001.GIF” he =“ 8” id =“ imag0.1” imgContent =“ undefined” imgFormat =“ GIF” wi =“ 28” /> （AlN）（SiC） 1-x （AlN） x 的升华方法。 SUBSTANCE：固溶体（SiC）（SiC） 4-x （AlN） x （AlN）（SiC） 1-x的外延层的生产方法（AlN） x 的特征在于，以多晶烧结SiC + AlN的形式从源中进行升华，其中以下成分的质量百分比为：SiC 20-80;余额AlN。该方法在x = 0.35-0.9的间隔内提供了完美的预设构图图层。效果：降低流程成本。 1载重吨
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