首页>
外国专利>
CORRECTION PRISM UNIT AND ALIGNER EMPLOYING IT
CORRECTION PRISM UNIT AND ALIGNER EMPLOYING IT
展开▼
机译：矫正棱镜单元和ALIGNER员工
展开▼
页面导航
摘要
著录项
相似文献
摘要
PURPOSE:To allow correction of distortion between a plurality of aligners by disposing a pair of prisms on an incident optical path and then altering the attitude thereof thereby correction the distortion and the like. CONSTITUTION:A mask 21 formed with a predetermined pattern and a correction prism unit 22 comprising a pair of prisms 1, 2 are disposed on the optical path 20a of exposing light emitted from a light source 20. An attitude controller 32 receives an image signal from a TV camera 31 as the positional information of a semiconductor wafer 27 and controls the magnification and the interval of the prisms 1, 2, i.e., the beam shift, based on the positional information and the angle of arrangement of each prism 1, 2 in the prism correction unit 22. The attitude controller 32 has a function for shifting an XY table mounting the semiconductor wafer 27 depending on the beam shift. This constitution corrects distortion between aligners at the time of exposure.
展开▼
