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CAPACITY TYPE THIN FILM ABSOLUTE PRESSURE SENSOR, RESISTOR TYPE THIN FILM ABSOLUTE PRESSURE SENSOR, AND THIN FILM FORMING METHOD FOR MANUFACTURING CAPACITY TYPE ABSOLUTE PRESSURE SENSOR
CAPACITY TYPE THIN FILM ABSOLUTE PRESSURE SENSOR, RESISTOR TYPE THIN FILM ABSOLUTE PRESSURE SENSOR, AND THIN FILM FORMING METHOD FOR MANUFACTURING CAPACITY TYPE ABSOLUTE PRESSURE SENSOR
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机译：电容式薄膜绝对压力传感器，电阻式薄膜绝对压力传感器以及制造电容式绝对压力传感器的薄膜形成方法
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摘要
PURPOSE: To provide a thin film absolute pressure sensor by forming an airtightly sealed cavity and a diaphragm on a glass substrate as base element. ;CONSTITUTION: The capacity type absolute pressure sensor comprises a glass substrate 11 as a base element and a diaphragm 15' adjacent to an airtightly sealed cavity 18. The base element supports a first mutual connecting line 14 in the cavity 18 side and a base electrode 21' extended from the connecting line 14 and having a corner pad. A diaphragm 15' made of a material of a first insulating layer 15 formed on the substrate 11 by evaporation is covered with a tip electrode 16' in the remote side to the cavity 18 and further covered completely with a second insulating layer 19 to seal the cavity 18 be air-tight. The electrode 16' has a second connecting part 17 extended to the insulating layer 15 in the outside of the diaphragm 15'. Consequently, the capacitor electrodes in the sensor has mutually high insulation resistance and respective diaphragms only show small tensile strain. Moreover, no evaporation process is required to prevent adhesion of the diaphragms to the substrate.;COPYRIGHT: (C)1995,JPO
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