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Thin film modulo null in order to produce the capacity die thin film absolute pressure sensor, the resistant die thin film absolute pressure sensor and the capacity die absolute pressure sensor
Thin film modulo null in order to produce the capacity die thin film absolute pressure sensor, the resistant die thin film absolute pressure sensor and the capacity die absolute pressure sensor
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机译:薄膜模零以生产电容模具薄膜绝对压力传感器,电阻模具薄膜绝对压力传感器和电容模具绝对压力传感器
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摘要
PURPOSE: To provide a thin film absolute pressure sensor by forming an airtightly sealed cavity and a diaphragm on a glass substrate as base element. ;CONSTITUTION: The capacity type absolute pressure sensor comprises a glass substrate 11 as a base element and a diaphragm 15' adjacent to an airtightly sealed cavity 18. The base element supports a first mutual connecting line 14 in the cavity 18 side and a base electrode 21' extended from the connecting line 14 and having a corner pad. A diaphragm 15' made of a material of a first insulating layer 15 formed on the substrate 11 by evaporation is covered with a tip electrode 16' in the remote side to the cavity 18 and further covered completely with a second insulating layer 19 to seal the cavity 18 be air-tight. The electrode 16' has a second connecting part 17 extended to the insulating layer 15 in the outside of the diaphragm 15'. Consequently, the capacitor electrodes in the sensor has mutually high insulation resistance and respective diaphragms only show small tensile strain. Moreover, no evaporation process is required to prevent adhesion of the diaphragms to the substrate.;COPYRIGHT: (C)1995,JPO
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