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METHOD OF INTEGRATING A SEMICONDUCTOR COMPONENT WITH A POLYMERIC OPTICAL WAVEGUIDE COMPONENT, AND THE RESULTING ELECTRO-OPTICAL DEVICE
METHOD OF INTEGRATING A SEMICONDUCTOR COMPONENT WITH A POLYMERIC OPTICAL WAVEGUIDE COMPONENT, AND THE RESULTING ELECTRO-OPTICAL DEVICE
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机译：将半导体组件与聚合物光学波导组件集成的方法及所产生的光电设备
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摘要
The invention relates to a method of fabricating an electro-optical device which comprises integrating a semiconductor component with a polymeric optical waveguide component. According to the invention, a semiconductor component obtained by epitaxial lift-off (ELO) is embedded in a waveguide device which in addition to a polymeric optical waveguide structure comprises an appropriate cavity. The invention further pertains to an integrated electro-optical device attainable by means of this ELO technique. Notably, it concerns an integrated electro-optical device in which the polymeric waveguide component and the semiconductor component are integrated on a substrate made of a different material from that of the semiconductor component, preferably a material with good heat dissipation, such as silicon. Preferably, the polymeric waveguide component comprises a polymer in which waveguide channels have been provided by bleaching.
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