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首页> 外国专利> Electrostatic micro-transducer designed to avoid sticking of mobile electrode - including poly:silicon@ mobile electrode plate, electrode substrate, connection which elastically supports plate and stationary electrode

Electrostatic micro-transducer designed to avoid sticking of mobile electrode - including poly:silicon@ mobile electrode plate, electrode substrate, connection which elastically supports plate and stationary electrode

机译：静电微型换能器，旨在避免移动电极粘住-包括poly：silicon @移动电极板，电极基板，弹性支撑板和固定电极的连接

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摘要

The micro-transducer has (i) a mobile electrode plate (5) of microcrystalline; (ii) a substrate (2) surrounding and consisting of the same material as the electrode plate (5); (iii) a connection (4) for connecting the electrode plate (5) to the substrate (2) and for elastically supporting the electrode plate (5); (iv) a stationary electrode (6) facing and spaced from a main surface of the electrode plate (5); and (v) a device for preventing adhesion of the electrode plate (5) to the electrode (6) caused by residual dielectric polarisation, residual electric charge and/or water in the region of possible contact between the electrodes (5,6) when the electrode plate (5) is excessively displaced. ADVANTAGE - The microtransducer (e.g. a microsensor or microactuator) operates reliably since sticking of the mobile electrode is prevented.
机译：微型换能器具有（i）微晶的移动电极板（5）; （ii）包围（2）与电极板（5）相同材料的基板（2）; （iii）连接件（4），用于将电极板（5）连接到基板（2）并弹性地支撑电极板（5）; （iv）与电极板（5）的主面相对且隔开间隔的固定电极（6）。 （v）一种用于防止电极板（5）在电极（5,6）之间可能接触的区域中由残留的电介质极化，残留的电荷和/或水引起的粘附到电极（6）的装置。电极板（5）移位过大。优点-微换能器（例如微传感器或微致动器）能够可靠地运行，因为可以防止移动电极的粘附。

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