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IR sensor in the form of pyroelectric detector - has silicon@ substrate with pyroelectric sensor film metallise to a pattern

机译：热释电探测器形式的红外传感器-具有硅@基板，热释电传感器膜镀金属成图案

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摘要

Infrared sensor (in the form of pyro-electic detector) has a substrate e.g. of Si (1) on which there is a sensor film (2) of pyroelectric material, metallised to a selected pattern. The metallised areas (5) on the film are bonded to smaller gate electodes (4) formed on the substrate either directly or via a thin insulative gate coating (6) for capacitative coupling. Gate electrodes corresp. with the metallised areas of the film, which can be of polyvinylidene fluoride. ADVANTAGE - Substrate and sensor are thermally decoupled as far as possible.

机译：红外传感器（热释电检测器的形式）具有衬底，例如在其上具有热释电材料的传感器膜（2）的Si（1）上，金属化成选定的图案。膜上的金属化区域（5）直接或通过薄的绝缘栅涂层（6）粘结到在基板上形成的较小的栅电极（4）进行电容耦合。栅电极相应。膜的金属化区域可以是聚偏二氟乙烯。优势-基板和传感器尽可能热分离。

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公开/公告号DE4105591C1

专利类型
公开/公告日1992-04-02

原文格式PDF
申请/专利权人 MESSERSCHMITT-BOELKOW-BLOHM GMBH 8012 OTTOBRUNN DE;
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申请/专利号DE19914105591
发明设计人 PLATZ WILLY DIPL.-PHYS. DR. 8000 MUENCHEN DE;PLOSS BERND DIPL.-PHYS. DR. 7550 RASTATT DE;BAUER SIEGFRIED DIPL.-PHYS. DR. 7507 PFINZTAL DE;
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申请日1991-02-22
分类号G01J5/10;H01L31/10;
国家 DE
入库时间 2022-08-22 05:25:40

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