SOFT LANDER FOR WAFER TRANSPORTATION

• 1. 一种晶圆运输方法、晶圆运输装置及系统 [P] . 中国专利： CN107546163A . 2018-01-05
• 2. 晶圆运输载具以及晶圆盒检测方法 [P] . 中国专利： CN110060939B . 2021.12.21
• 3. SOFT LANDER FOR WAFER TRANSPORTATION [P] . 韩国专利： KR920004053Y1 . 1992-06-20

  机译： 晶圆运输软着陆器

• 4. Wafer softlanding system and cooperative door assembly [P] . 美国专利： US4752219A . 1988-06-21

  机译： 晶圆软着陆系统和协作门组件

• 5. SOFT LANDING SYSTEM FOR HEAT TREATMENT FURNACE OF SEMICONDUCTOR WAFER [P] . 日本专利： JPS63316428A . 1988-12-23

  机译： 半导体晶片热处理炉的软着陆系统

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• 7. Development of a Whole-Wafer, Macroscale Inspection Software Method for Semiconductor Wafer Analysis [R] . 2003

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