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ELECTROSTATICALLY DRIVEN DUAL VIBRATING BEAM FORCE TRANSDUCER
ELECTROSTATICALLY DRIVEN DUAL VIBRATING BEAM FORCE TRANSDUCER
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机译：静电驱动双振动梁力传感器
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摘要
a force transducer with two branches includes an electrostatic drive vibrating system. the transducer includes a body (12) with first and second arms (20, 22) are generally parallel, linked by their ends. the first and second electrodes (14, 16) are adjacent to the respective branches without touching them.a drive circuit (18) applies an oscillating voltage to electrodes by electrostatic forces and the branches swaying in the plan that contains all the vibration. the mechanical resonance branches, regulates the oscillation frequency, so that the frequency is a function of a force applied along the branches.in one embodiment, the training device is directly coupled to one of the branches.
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