首页> 外国专利> REFLECTION TYPE MICROSCOPE OBJECTIVE LENS, PROJECTING AND VERTICAL ILLUMINATING DEVICE FOR REFLECTION TYPE MICROSCOPE HAVING THIS OBJECTIVE LENS AND REFLECTION TYPE MICROSCOPE SYSTEM HAVING THIS OBJECTIVE LENS

REFLECTION TYPE MICROSCOPE OBJECTIVE LENS, PROJECTING AND VERTICAL ILLUMINATING DEVICE FOR REFLECTION TYPE MICROSCOPE HAVING THIS OBJECTIVE LENS AND REFLECTION TYPE MICROSCOPE SYSTEM HAVING THIS OBJECTIVE LENS

机译:反射型显微镜物镜,具有该目的透镜的反射型显微镜的投影及垂直照明装置以及反射型显微镜系统及该目的透镜

摘要

PURPOSE:To obtain the lens which has a large numerical aperture, a small central shielding rate and a high resolution by constituting the objective lens of two concave mirrors, a plane mirror and a convex mirror and forming this lens so as to satisfy prescribed conditions. CONSTITUTION:The reflected light from an object surface is reflected by the concave mirror L14, the plane mirror L13, the concave mirror L12, and the con cave mirror L11 in this order, by which images are formed. These mirrors are so formed as to satisfy the conditions to attain ¦u¦¦u'¦ when the angle formed by the incident ray on the concave mirror L14 with the optical axis is designated as u and the angle formed by the reflected ray with the optical axis as u'. The large numerical aperture is, therefore, obtd. with the reflecting mirror having a large F-number and since the resolving power of the lens is inversely proportional to the numerical aperture, the high resolving power is obtd. The central shielding rate epsilon is decreased to =20% as against 40 to 50% of the conventional lenses by adequately selecting the lens diameter and spacing.
机译:用途:通过构成两个凹面镜,一个平面镜和一个凸面镜的物镜,并使其满足规定条件,从而获得具有大数值孔径,较小的中心遮光率和高分辨率的透镜。组成:从物体表面反射的光依次由凹面镜L14,平面镜L13,凹面镜L12和凹面镜L11反射,从而形成图像。当将由凹面镜L14上的入射光线形成的与光轴的夹角设为u,将由反射光线形成的夹角设为u时,这些反射镜形成为满足获得“ u”>“ u”的条件。光轴为u'。因此,数值孔径较大。在具有大F数的反射镜的情况下,并且由于透镜的分辨力与数值孔径成反比,因此无法获得高分辨力。中央屏蔽率的ε-是通过适当地选择透镜的直径和间距减小到<= 20%作为对40向传统透镜的50%。

著录项

  • 公开/公告号JPH04407A

    专利类型

  • 公开/公告日1992-01-06

    原文格式PDF

  • 申请/专利权人 HITACHI LTD;

    申请/专利号JP19900100438

  • 发明设计人 KOSHISHIBA HIROYA;NAKAGAWA YASUO;

    申请日1990-04-18

  • 分类号G02B17/00;G02B13/18;G02B21/00;G02B21/02;G02B21/08;G02B21/16;

  • 国家 JP

  • 入库时间 2022-08-22 05:37:02

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