By a DC power supply means 10 connected to the cathode 5 provided in the vacuum coating chamber 15a and electrically connected to the target 3 to be sputtered; A sputtering particle as an apparatus for coating aluminum on a substrate 1 made of polymethylmethacrylate, which is deposited on the substrate 1; Helium as the process gas is introduced into the coating chambers 15 and 15a to improve adhesion and life.
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