METHOD OF THE DEPOSIT dielectric films in a plasma glow discharge.

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  机译： 在等离子体辉光放电中沉积介电膜的方法

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  机译： 使用辉光放电沉积电介质膜的装置和方法

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  机译： 在等离子辉光放电中沉积介电层的方法

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