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SCANNING ELECTRON MICROSCOPE SYSTEM FOR INVESTIGATION OF SPECIMEN STRUCTURES
SCANNING ELECTRON MICROSCOPE SYSTEM FOR INVESTIGATION OF SPECIMEN STRUCTURES
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机译：用于样品结构研究的扫描电子显微镜系统
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1532862 Automatic control CARL-ZEISS JENA VEB 25 Aug 1976 [24 Sept 1975] 35384/76 Heading G3N In a scanning electron microscope system for measuring the separation of two points on a specimen 9, image signals 13 from detectors 10, 11, 12 are fed via circuitry 16 to a cathode ray tube, e.g. 20, associated with a device 23 which projects a calibrated grid on to the c.r.t. screen; a distance which is measured using the grid being the sum of a relatively small displacement of the electron beam caused and measured by a deflection system 21x, 21y, and a relatively large displacement caused by movement of the specimen and measured by a further measuring system. The two displacements are automatically combined and fed to a display unit 22. The arrangement permits the measurement of distances up to a decimetre with an accuracy of a tenth of a micrometre. The positioning of the specimen may be preselected and actuated via data input member 29 either manually or by numerical control, e.g. punched tape. The specimen is moved by stepping motors 27 under the control of a computer 28, and the x and y displacements of the specimen are measured by a laser system 30 incorporating measuring prisms 31 and reference prisms 32.
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机译：1532862自动控制CARL-ZEISS JENA VEB 1976年8月25日[1975年9月24日] 35384/76标题G3N在扫描电子显微镜系统中，用于测量样品9上两点的分离，来自探测器10、11、12的图像信号13经由电路16馈送到例如阴极射线管装置20与将校准的栅格投影到c.r.t.上的装置23相关联。屏幕;使用栅格测量的距离是由偏转系统21x，21y引起和测量的相对较小的电子束位移与由试样的运动引起并由另一测量系统测量的相对较大的位移之和。这两个位移被自动组合并馈送到显示单元22。该布置允许以十分之一微米的精度测量直至十米的距离。样本的定位可以通过数据输入构件29手动地或通过数控，例如数字输入来预先选择和致动。穿孔纸带。样品在计算机28的控制下由步进电机27移动，样品的x和y位移通过装有测量棱镜31和参考棱镜32的激光系统30进行测量。
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