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Scanning of tilted sample by raster electron microscope - avoids parallelogram distortion of image by sufficiently rotating raster
Scanning of tilted sample by raster electron microscope - avoids parallelogram distortion of image by sufficiently rotating raster
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机译：用光栅电子显微镜扫描倾斜的样品-通过充分旋转光栅避免图像的平行四边形失真
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摘要
The tilted sample is mechanically rotated in one step, so that its slope angle is constant, and the x2 direction, in which the electrom beam is deflected, coincides with the x1, direction of the sample. An electric raster rotating device is now turned through the angle delta in the same direction, until the x2 direction is rotated w.r.t. the direction x1 by the same angle as the y2 direction corresponding to the beam advance differs from the y1 direction of the sample. The angle delta is derived from the measured working distance and the sample angle of inclination alpha. The sample is then rotated back until the sample x1 direction coincides with the beam x2 direction, and the sample y1 with the beam y2 direction.
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