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Leak detector method of operation - has tested samples connected to the leak detector vacuum system or placed in a sample space

机译:检漏仪的操作方法-已测试的样品已连接到检漏仪真空系统或放置在样品空间中

摘要

The sample test space is connected to the detector vacuum system. The samples or the sample test space are flooded after testing with a gas free from the test gas. The free from test-gas stream flowing during sample change out from the connection flange for samples, or from the sample space, is maintained. A vessel is provided, to which through valves are connected a vacuum pump, a leak detector and a cylinder with the gas free from the test gas. The vessel has in addition a connection piece for the samples. It is arranged as a test space for small samples. This space is separated from the vessel by a partition preventing turbulence. The leak detector is a mass spectroscope.
机译:样品测试空间连接到检测器真空系统。测试后,样品或样品测试空间将充满不含测试气体的气体。保持了在样品更换过程中从测试用连接法兰或从样品空间流出的无测试气流。提供了一种容器,通过该阀连接有真空泵,检漏仪和气缸,其中的气体不含测试气体。该容器还具有用于样品的连接件。它被安排作为小样本的测试空间。该空间通过防止湍流的隔板与容器隔开。检漏仪是质谱仪。

著录项

  • 公开/公告号DE2334886A1

    专利类型

  • 公开/公告日1975-01-30

    原文格式PDF

  • 申请/专利权人 LEYBOLD-HERAEUS GMBH & CO KG;

    申请/专利号DE19732334886

  • 发明设计人 BEECKUDODIPL.-PHYS.;

    申请日1973-07-09

  • 分类号G01M3/04;

  • 国家 DE

  • 入库时间 2022-08-23 03:59:05

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