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process for the manufacture of siliciumstaeben with relatively large diameters by tiegelfreies zone fusion

机译:铁金矿区熔融制造直径较大的硅酸锗的方法

摘要

In a crucible-less zone melting process, an extension rod of Si of small dia. is joined to the bottom end of a large-dia. polycrystalline Si rod. The latter is then zone-melted in an advance zone, starting from the joint. The top end is conically waisted at the end of the zone passage and the rod assembly is reversed. A seed crystal is now fused to the conical bottom end and the conventional zone melting process is completed. This process represents a simple prodn. of large-dia. single-crystals of Si. The reversal of the pulling direction results in a more uniform doping of the rod.
机译:在无坩埚区域熔化过程中,Si的延伸杆直径较小。连接到大直径的底端。多晶硅棒。然后将后者从接头处在提前区域中进行区域熔化。顶端在区域通道的末端呈圆锥形缩腰,并且杆组件翻转。现在将籽晶熔化到圆锥形底端,完成了常规的区域熔化过程。这个过程代表一个简单的过程。大直径。 Si单晶。拉动方向的反向导致杆的掺杂更均匀。

著录项

  • 公开/公告号DE000002314971A

    专利类型

  • 公开/公告日1974-10-03

    原文格式PDF

  • 申请/专利权人 SIEMENS AG;

    申请/专利号DE2314971A

  • 发明设计人 KRAMER HERBERT;

    申请日1973-03-26

  • 分类号B01J17/10;

  • 国家 DE

  • 入库时间 2022-08-23 05:34:41

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