INFRARED OPTICAL SCANNING SYSTEM COMPRISING A ROTATABLE FACETED MIRROR HAVING INCLINED FACETS

• 1. 制造弯曲玻璃片的方法、执行该方法的制造系统、具有弯曲镜面的弯曲镜面组件和弯曲镜面或具有弯曲镜面的组件的使用 [P] . 中国专利： CN102575874A . 2012-07-11
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  机译： 红外光学扫描系统，包括可旋转的正面镜面且具有倾斜面的镜面

• 4. Facet mirror for illumination optics of optical system of lighting system in projection exposure system for EUV projection lithography at lighting field, has facet main assembly plane arranged in facet mirror surfaces of reflecting facets [P] . 德国专利： DE102013212363A1 . 2014-07-31

  机译： 用于EUV投影光刻的投影曝光系统中的照明系统的光学系统的照明光学系统的分面镜，在反射面的分面镜面中配置有分面主组件平面

• 5. Rotating multi-faceted mirror for an optical scanning apparatus [P] . 美国专利： US6738172B2 . 2004-05-18

  机译： 用于光学扫描设备的旋转多面镜

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• 1. Micro-Scanning Error Correction Technique for an Optical Micro-Scanning Thermal Microscope Imaging System [J] . Meijing Gao ,Ying Han ,Qiushi Geng . 北京理工大学学报：英文版 . 2019,第3期
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