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首页> 外文会议>Space Telescopes and Instrumentation I: Optical, Infrared, and Millimeter pt.2 >The JWST Infrared Scanning Shack Hartman System: A new in-process way to measure large mirrors during optical fabrication at Tinsley
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The JWST Infrared Scanning Shack Hartman System: A new in-process way to measure large mirrors during optical fabrication at Tinsley

机译：JWST红外扫描Shack Hartman系统：在Tinsley光学制造过程中测量大型镜面的新工艺

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摘要

Tinsley, under JWST funding, has led the team that has developed a novel and highly versatile piece of ground support equipment for optical surface testing of JWST beryllium mirror segments during optical fabrication. The infrared Scanning Shack Hartmann System (SSHS) offers the advantage of being able to characterize mid-to-high spatial frequency structure on a mirror from early stages of fabrication when slopes may be high and surface irregular, eliminating the need for an extra polishing step before metrology. Working at 9.3um, the system will accept and measure a wide dynamic range of surface characteristics, including roll-off near the edge of the segment. Knowledge of these surface features at the early grinding stage is imperative if characteristics such as mirror edge roll-off are to be minimized. WaveFront Sciences, producer of commercial COAS™ and Columbus™ Shack Hartmann systems, has provided systems engineering and component support for the SSHS system. The SSHS system is based around a special Long Wave Infrared (LWIR) wavefront sensor developed by WaveFront Sciences that is scanned over the mirror surface, making sub-aperture measurements. The smaller, high-resolution measurements are then stitched together to provide high-resolution measurement of the entire mirror surface, even though the surface is in a rough ground state. The system leverages technology from smaller visible instrumentation produced by Wavefront Sciences, especially those for surface sub-aperture measurements of semiconductor wafers. Although the scale of the SSHS is significantly larger than previous applications, substantial commercial technology is directly applicable to the Infrared SSHS with little or no modification. Extensive use was made of existing algorithms for frame stitching and focal spot centroiding. This paper will describe the implementation of the first infrared scanning Shack Hartmann system at Tinsley to address optical fabrication optimization of the JWST Primary Mirror Segments.
机译：由JWST资助的Tinsley领导了一个团队，该团队开发了一种新颖且用途广泛的地面支撑设备，用于在光学制造期间对JWST铍镜段的光学表面进行测试。红外扫描Shack Hartmann系统（SSHS）的优势在于，可以在制造的早期阶段（当斜率可能很高且表面不规则时）在反射镜上表征中高空间频率结构，从而无需额外的抛光步骤计量之前。该系统工作在9.3um，将接受并测量各种动态范围的表面特征，包括在段边缘附近的滚落。如果要使诸如镜面边缘滚落之类的特性最小化，则必须在早期磨削阶段了解这些表面特征。商用COAS™和Columbus™Shack Hartmann系统的生产商WaveFront Sciences已为SSHS系统提供了系统工程和组件支持。 SSHS系统基于WaveFront Sciences开发的特殊长波红外（LWIR）波阵面传感器，该传感器在镜面上进行扫描，以进行子孔径测量。然后将较小的高分辨率测量值缝合在一起，以提供整个镜面的高分辨率测量值，即使该表面处于粗糙的地面状态也是如此。该系统利用Wavefront Sciences生产的较小可见仪器的技术，特别是用于半导体晶片表面亚孔径测量的技术。尽管SSHS的规模比以前的应用程序大得多，但是大量的商业技术几乎无需修改就可以直接应用于红外SSHS。大量使用现有算法进行帧拼接和焦点重心化。本文将描述Tinsley的第一个红外扫描Shack Hartmann系统的实现，以解决JWST主镜段的光学制造优化问题。

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