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Low noise amplifier transistors with decreased noise figure and leakage in silicon-on-insulator technology

机译:低噪声放大器晶体管,噪音与绝缘技术噪声系数降低和漏电

摘要

A metal oxide semiconductor field effect transistor preferably fabricated with a silicon-on-insulator process has a first semiconductor region and a second semiconductor region in a spaced relationship thereto A body structure is defined by a channel segment between the first semiconductor region and the second semiconductor region, and a first extension segment structurally contiguous with the channel segment. A shallow trench isolation structure surrounds the first semiconductor region, the second semiconductor region, and the body structure, with a first extension interface being defined between the shallow trench isolation structure and the first extension segment of the body structure to reduce leakage current flowing from the second semiconductor region to the first semiconductor region through a parasitic path of the body structure.
机译:优选地制造有绝缘体的金属氧化物半导体场效应晶体管具有第一半导体区域,并且与第一半导体区域和第二半导体之间的沟道段限定了第一半导体区域的第一半导体区域和第二半导体区域。区域,以及与信道段结构地连续的第一扩展段。浅沟槽隔离结构围绕第一半导体区域,第二半导体区域和主体结构,第一延伸界面被定义在浅沟槽隔离结构和主体结构的第一延伸区段之间,以减少流动的漏电流通过主体结构的寄生路径到第一半导体区域的第二半导体区域。

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