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Position measurement test unit for alignment of gas distribution plate applied to semiconductor or display manufacturing and center alignment method using the position measurement test unit
Position measurement test unit for alignment of gas distribution plate applied to semiconductor or display manufacturing and center alignment method using the position measurement test unit
A test unit for position measurement for alignment of a gas distribution plate applied to the semiconductor or display manufacturing disclosed, and a center alignment method using the test unit for position measurement include a storage unit for storing a sensing object, and a guide pin hole is formed. A seating member on which a sensing object can be seated, a transfer robot that transfers the sensing object stored in the storage unit to the seating member, and gas in the sensing object disposed above the seating member and seated on the seating member It is applied when manufacturing a semiconductor or a display in a semiconductor or display manufacturing facility equipped with a gas distribution plate that injects a gas, and includes a body member, an image information acquisition member, and a control member, and the seating member is operated by the transfer robot. In a state in which the center and the center of the body member are aligned, the control member controls the position correction of the gas distribution plate by using the image information obtained from the image information acquisition member, so that the center of the seating member and the body As the center of the member and the center of the gas distribution plate are aligned with each other, the gas injected from the gas injection hole of the gas distribution plate can be uniformly sprayed over the entire area of the sensing object seated on the seating member. There is an advantage of being.
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