首页> 外国专利> ELECTRICAL MEASUREMENT-TYPE SURFACE PLASMON RESONANCE SENSOR, ELECTRICAL MEASUREMENT-TYPE SURFACE PLASMON RESONANCE SENSOR CHIP, AND METHOD FOR DETECTING CHANGE IN SURFACE PLASMON RESONANCE

ELECTRICAL MEASUREMENT-TYPE SURFACE PLASMON RESONANCE SENSOR, ELECTRICAL MEASUREMENT-TYPE SURFACE PLASMON RESONANCE SENSOR CHIP, AND METHOD FOR DETECTING CHANGE IN SURFACE PLASMON RESONANCE

机译:电气测量型表面等离子体谐振传感器,电测量型表面等离子体谐振传感器芯片,以及检测表面等离子体共振变化的方法

摘要

An electric measurement-type surface plasmon resonance sensor 510 comprises a plasmon resonance enhancing sensor chip 110 and an electrical measurement device 21. The plasmon resonance enhancing sensor chip 110 comprises a sensor chip 101 and a prism 1. In the sensor chip 101, an electrode 2, a silicon semiconductor film 3, and a plasmon resonance film electrode 4 are disposed in this order. In the plasmon resonance enhancing sensor chip 110, the prism 1, the electrode 2, the silicon semiconductor film 3, and the plasmon resonance film electrode 4 are disposed in this order. The electrical measurement device 21 measures an electric current or voltage directly from the electrode 2 and the plasmon resonance film electrode 4.
机译:电测量型表面等离子体谐振传感器510包括等离子体谐振增强传感器芯片110和电测量装置21.等离子体谐振增强传感器芯片110包括传感器芯片101和棱镜1.在传感器芯片101中,电极如图2所示,硅半导体膜3和等离子体谐振膜电极4设置。在等离子体谐振增强传感器芯片110中,棱镜1,电极2,硅半导体膜3和等离子体谐振膜电极4依次设置。电测量装置21直接从电极2和等离子体谐振膜电极4测量电流或电压。

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