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Method for controlling etching profile of point etching module and point etching module using annular surface discharge plasma device
Method for controlling etching profile of point etching module and point etching module using annular surface discharge plasma device
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机译：使用环形表面放电等离子体装置控制点蚀刻模块和点蚀刻模块的蚀刻轮廓的方法
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摘要
A point etching module utilizing an annular surface discharge plasma apparatus is disclosed.The point etching module utilizing the annular surface discharge plasma device isPlate shaped dielectricA circular electrode disposed in contact with the top surface of the dielectricDisposed in contact with the bottom surface of the dielectric materialAn annular electrode that provides a gas reservoir space for storing gasIncludes a power supply providing a high voltage between the circular electrode and the annular electrode;When a high voltage is applied and discharge starts,A filamentary plasma is irradiated from the plasma developed in the center direction of the annular electrode between the inner surface of the annular electrode and the lower surface of the dielectric material in the direction of the substrate to be processed.
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