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High Performance Interference Patterning Device Using Higher Harmonic Wave Source
High Performance Interference Patterning Device Using Higher Harmonic Wave Source
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机译:高性能干扰图案化装置使用高谐波源
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摘要
The present invention relates to a high-performance interference patterning apparatus using a high-order harmonic light source, comprising: a light source means and a grating pair arranged to diffract the light irradiated from the light source means to form an interference image; and an interference image obtained by interfering light diffracted from the grating pair is incident on a resist-coated sample surface to generate an interference pattern.
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