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NOVEL HYDROPHOBIC PINNING MAT FOR DIRECTED SELF-ASSEMBLY OF DIBLOCK COPOLYMER NOVEL COMPOSITIONS AND PROCESSES FOR SELF-ASSEMBLY OF BLOCK COPOLYMERS
NOVEL HYDROPHOBIC PINNING MAT FOR DIRECTED SELF-ASSEMBLY OF DIBLOCK COPOLYMER NOVEL COMPOSITIONS AND PROCESSES FOR SELF-ASSEMBLY OF BLOCK COPOLYMERS
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机译:用于指向自组装的二嵌段共聚物新型组合物和嵌段共聚物自组装方法的新型疏水钉垫
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摘要
The present invention relates to a novel styrenic polymer comprised of the repeat units of structures (I), (II), and (III), wherein R1, R2 and R3 are individually selected from H or a C-1 to C-4 linear alkyl, R5, R7 and R6 are individually selected from a C-1 to C-8 linear alkyl, a C-3 to C-8 linear alkyl and a C-3 to C-8 cyclic alkyl and to the novel composition comprised of this polymer and a spin on organic solvent. In another aspect of this invention it pertains to the use of this composition to create a grafted on a substrate, and a further aspect, this grafted film may be used in a directed self-assembly process.; 展开▼