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Root type vacuum pump

机译:根式真空泵

摘要

PROBLEM TO BE SOLVED: To provide a Roots type vacuum pump having high versatility and capable of efficiently preventing liquefaction and solidification of gas, and a method for operating the Roots type vacuum pump.SOLUTION: A Roots type vacuum pump 1 comprises a plurality of pump chambers 40c in which Roots type rotors 51 are arranged, compresses and exhausts sucked gas in multiple stages in the plurality of pump chambers 40c, and comprises a compressed gas return device 70 for returning a portion of compressed gas exhausted from at least one pump chamber 40c out of the plurality of pump chambers 40c to the suction side of the pump chamber 40c.SELECTED DRAWING: Figure 2
机译:要解决的问题:提供具有高通用性的根型真空泵,并且能够有效地防止气体液化和凝固,以及用于操作根型真空泵的方法。堆积型真空泵1包括多个泵 腔室40c,其中根型转子51布置,在多个泵腔室40c中的多个阶段中布置,压缩和排出吸入气体,并且包括压缩气体返回装置70,用于返回从至少一个泵室40c排出的压缩气体的一部分 在多个泵室40c中从泵室40c的吸入侧。选择的绘图:图2

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