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System and method for determining hybrid-manufacturing process plans for integrated circuits based on satisfiability modulo difference logic solver
System and method for determining hybrid-manufacturing process plans for integrated circuits based on satisfiability modulo difference logic solver
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机译：基于可满足模差逻辑求解器确定集成电路混合制造过程计划的系统和方法
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摘要
One embodiment of the present disclosure provides a system for determining a hybrid-manufacturing plan for manufacturing an integrated circuit (IC). During operation, the system can obtain a set of hybrid-manufacturing constraints for manufacturing the IC. The set of hybrid-manufacturing constraints can include a set of primitives, a set of atoms, and an atom end-state vector. An atom can correspond to a unit of spatial volume of the IC. A primitive can represent an additive, subtractive, or a mixed manufacturing process corresponding to one or more atoms of the IC. Next, the system can determine a plurality of feasible hybrid-manufacturing plans based on the set of manufacturing constraints. Each feasible hybrid-manufacturing plan can represent an ordering of the set of primitives that satisfies the atom end-state vector. The system can then determine costs for manufacturing the IC using the plurality feasible hybrid-manufacturing plans. The system can determine, based on the costs, an optimized hybrid-manufacturing plan for manufacturing the IC.
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