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Silicon melt convection pattern estimation method, silicon single crystal oxygen concentration estimation method, silicon single crystal manufacturing method, and silicon single crystal pulling device
Silicon melt convection pattern estimation method, silicon single crystal oxygen concentration estimation method, silicon single crystal manufacturing method, and silicon single crystal pulling device
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机译:硅熔体对流图案估计方法,硅单晶氧浓度估计方法,硅单晶制造方法和硅单晶拉动装置
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摘要
A convection pattern estimation method of a silicon melt includes: applying a horizontal magnetic field of 0.2 tesla or more to a silicon melt in a rotating quartz crucible with use of a pair of magnetic bodies disposed across the quartz crucible; before a seed crystal is dipped into the silicon melt to which the horizontal magnetic field is applied; measuring temperatures at a first and second measurement points positioned on a first imaginary line that passes through a center of a surface of the silicon melt and is not in parallel with a central magnetic field line of the horizontal magnetic field as viewed vertically from above; and estimating a direction of a convection flow in a plane in the silicon melt orthogonal to the direction in which the horizontal magnetic field is applied on a basis of the measured temperatures of the first and second measurement points.
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