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OPTICAL PROBE OPTICAL PROBE ARRAY OPTICAL PROBE CARD AND METHOD OF MANUFACTURING OPTICAL PROBE
OPTICAL PROBE OPTICAL PROBE ARRAY OPTICAL PROBE CARD AND METHOD OF MANUFACTURING OPTICAL PROBE
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机译：光学探针光学探针阵列光学探针和制造光学探头的方法
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摘要
Provided are an optical probe, an optical probe array, an optical probe card, and a method for manufacturing an optical probe in which a propagation mode is a single mode and capable of efficiently measuring an optical device. The optical probe 10 includes a first region 11 and a second region 12 connected so that optical waveguides having a single propagation mode are continuous. The first region 11 continuous to the tip surface 100 facing the optical device 20 has a maximum mode field diameter on the tip surface 100, the first region 11 and the second region 12 It includes a region gradually narrowing toward the region boundary 13 of . The tip surface 100 is a curved surface, and the radius of curvature of the tip surface 100 is set so that the propagation direction of the optical signal L incident from the tip surface 100 approaches parallel to the central axis direction of the optical waveguide. .
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