首页> 外国专利> ROTATION ACCURACY MEASUREMENT METHOD, ROTATION ACCURACY MEASUREMENT DEVICE, THREE-DIMENSIONAL SHAPE MEASUREMENT METHOD, THREE-DIMENSIONAL SHAPE MEASUREMENT DEVICE, AND OPTICAL DEVICE

ROTATION ACCURACY MEASUREMENT METHOD, ROTATION ACCURACY MEASUREMENT DEVICE, THREE-DIMENSIONAL SHAPE MEASUREMENT METHOD, THREE-DIMENSIONAL SHAPE MEASUREMENT DEVICE, AND OPTICAL DEVICE

机译:旋转精度测量方法,旋转精度测量装置,三维形状测量方法,三维形状测量装置和光学装置

摘要

This rotation accuracy measurement method is for measuring a rotation accuracy component by separating a shape error of an object to be measured and the rotation accuracy component through use of a plurality of displacement meters. In a first step (S3), a plurality of waveform signals indicating displacement are acquired by measuring, while rotating the object to be measured, displacement in distances between the displacement meters and the object to be measured by using the displacement meters. In a second step (S5), a similarity between the waveform signals is quantitatively assessed. In a third step (S6), the position of a displacement meter included in the displacement meters is adjusted so that the similarity becomes equal to or a higher than a prescribed value.
机译:这种旋转精度测量方法用于通过使用多个位移仪分离要测量的物体的形状误差和旋转精度部件来测量旋转精度分量。 在第一步骤(S3)中,通过测量来获取指示位移的多个波形信号,同时旋转待测物体,位移仪和通过使用位移仪测量的距离之间的距离。 在第二步骤(S5)中,定量地评估波形信号之间的相似性。 在第三步骤(S6)中,调整包括在位移仪中的位移仪的位置,使得相似度变得等于或高于规定值。

著录项

  • 公开/公告号WO2021240711A1

    专利类型

  • 公开/公告日2021-12-02

    原文格式PDF

  • 申请/专利权人 OLYMPUS CORPORATION;

    申请/专利号WO2020JP21065

  • 发明设计人 TERASAWA TOMOTAKE;

    申请日2020-05-28

  • 分类号G01B21;

  • 国家 JP

  • 入库时间 2022-08-24 22:36:52

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