首页> 外国专利> MICROELECTROMECHANICAL SYSTEM (MEMS) SCANNER HAVING ACTUATOR PAIRS CANTILEVERED ADJACENT TO OPPOSITE SIDES OF A SCANNING MIRROR

MICROELECTROMECHANICAL SYSTEM (MEMS) SCANNER HAVING ACTUATOR PAIRS CANTILEVERED ADJACENT TO OPPOSITE SIDES OF A SCANNING MIRROR

机译：微机电系统（MEMS）扫描仪，致动器对悬臂悬挂在扫描镜的相对侧附近

页面导航

摘要
著录项
相似文献

摘要

A microelectromechanical systems (MEMS) scanner (200) having actuator pairs (202) adjacent to sides (204) of a scanning mirror (206). Actuator pairs (202) include individual actuators (210) that are physically located adjacent to opposite sides (204) of the scanning mirror and that, upon activation, induce angular rotation into the scanning mirror (206). Torsional beam flexures (214) suspend the scanning mirror (206) from a frame structure (212) and facilitate rotation of the scanning mirror (206) about a rotational axis (218). During operation of the MEMS scanner, a drive signal may be applied to the actuator pair (202) to cause each individual actuator (210), of the actuator pair, to deform in unison, thereby generating some degree of tip deflection. Since the torsional beam flexures (214) are connected to the tips of the actuators (210) via the lever arms, this tip deflection serves as actuator stroke that induces torsional deformation into the torsional beam flexure (214) - thereby causing rotation of the scanning mirror (206) about the rotational axis (218).

机译：具有与扫描镜（206）的侧面（204）相邻的致动器对（202）的微机电系统（MEMS）扫描仪（200）。致动器对（202）包括单独的致动器（210），其物理位于扫描镜的相对侧（204）附近，并且在激活时，诱导角度旋转进入扫描镜（206）。扭转梁挠曲（214）悬挂扫描镜（206）从框架结构（212），并促进扫描镜（206）绕旋转轴（218）的旋转。在MEMS扫描仪的操作期间，可以将驱动信号施加到致动器对（202），以使致动器对的每个单独的致动器（210），并齐声变形，从而产生一定程度的尖端偏转。由于扭转梁弯曲（214）经由杠杆臂连接到致动器（210）的尖端，所以该尖端偏转用作致动器行程，从而使扭转梁弯曲（214）引起扭转变形 - 从而导致扫描的旋转关于旋转轴（218）的镜子（206）。

著录项

公开/公告号WO2021257183A1

专利类型
公开/公告日2021-12-23

原文格式PDF
申请/专利权人 MICROSOFT TECHNOLOGY LICENSING LLC;
展开▼

申请/专利号WO2021US29027
发明设计人 BARAN UTKU;
展开▼

申请日2021-04-25
分类号B81B3;G02B26/08;
国家 US
入库时间 2022-08-24 23:01:32

相似文献

专利
外文文献
中文文献