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首页> 美国政府科技报告 >PolyMEMS Actuator: A Polymer-Based Microelectromechanical (MEMS) actuator with Macroscopic Action
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PolyMEMS Actuator: A Polymer-Based Microelectromechanical (MEMS) actuator with Macroscopic Action

机译：polymEms执行器：基于聚合物的微机电（mEms）执行器，具有宏观作用

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摘要

A polymer-based MEMS actuator, consisting of small unit cells in a macroscopic array, was developed and demonstrated. Models were developed which predicted the performance, and actuators were fabricated which matched the theoretical predictions. Deformation due to imperfect assembly resulted in imperfect performance. Further work is required to develop a reliable assembly process. Numerous polymer-based fabrication procedures were developed. Many of them borrow from either silicon or flexible printed circuit manufacturing, but modifications were necessary in order to adapt the processes to MEMS. The actuator is very efficient and uses very little power, making it suitable for autonomous applications such as robots.

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