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A Thermally Actuated Microelectromechanical (MEMS) Device For Measuring Viscosity

机译：用于测量粘度的热致动微机电（MEMS）装置

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摘要

A thermally actuated non-cantilever-beam microelectromechanical viscosity sensor is presented. The proposed device is based on thermally induced vibrations of a simple silicon diaphragm and its damping due to the surrounding fluid. This vibration viscometer device utilizes thermal actuation through an in situ resistive heater and piezoresistive sensing, both of which utilize CMOS compatible materials leading to an inexpensive and reliable system. Thermal analysis was performed utilizing temperature diodes in the silicon diaphragm to determine the minimum heater voltage pulse amplitude and time in order to prevent heat loss to the oil under test that would lead to local viscosity changes. Viscosity measurements were performed and compared to motor oil measured on a commercial cone-and-plate viscometer.$hfill$ [2010-0130]
机译：提出了一种热激励非悬臂梁微机电粘度传感器。所提出的装置基于简单的硅膜片的热诱导振动及其由于周围流体引起的阻尼。这种振动粘度计装置利用通过原位电阻加热器的热致动和压阻感测，二者均利用兼容CMOS的材料制成了廉价而可靠的系统。使用硅膜片中的温度二极管进行热分析，以确定最小的加热器电压脉冲幅度和时间，以防止热量流失到被测油中，从而导致局部粘度变化。进行粘度测量，并将其与在商用锥板粘度计上测量的机油进行比较。$ hfill $ [2010-0130]

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