首页> 外国专利> Microelectromechanical system (MEMS) structure e.g. pressure sensor used in MEMS device, has adjustable ventilation opening that is passively actuated as function of pressure difference between preset space and predetermined space

Microelectromechanical system (MEMS) structure e.g. pressure sensor used in MEMS device, has adjustable ventilation opening that is passively actuated as function of pressure difference between preset space and predetermined space

机译：微机电系统（MEMS）结构MEMS设备中使用的压力传感器具有可调节的通风口，该通风口根据预设空间和预定空间之间的压差而被动地致动

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摘要

The MEMS structure has a backplate (120) and a membrane that is spaced a gap distance from the backplate. An adjustable ventilation opening is configured to reduce a pressure difference between a first space contacting a first side of the membrane and second space contacting an opposite second side of the membrane. The adjustable ventilation opening is passively actuated as a function of the pressure difference between the first space and the second space. An independent claim is included for MEMS device.

机译：MEMS结构具有背板（120）和与背板间隔一定距离的膜。可调节的通风口构造成减小与膜的第一侧接触的第一空间与与膜的相对的第二侧接触的第二空间之间的压力差。可调节的通风口根据第一空间和第二空间之间的压力差被被动地致动。 MEMS设备享有独立权利要求。

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公开/公告号DE102013211943A1

专利类型
公开/公告日2013-12-24

原文格式PDF
申请/专利权人 INFINEON TECHNOLOGIES AG;
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申请/专利号DE201310211943
发明设计人 DEHE ALFONS;HERRMANN MATTHIAS FRIEDRICH;KRUMBEIN ULRICH;BARZEN STEFAN;KLEIN WOLFGANG;FRIZA WOLFGANG;WURZER MARTIN;
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申请日2013-06-24
分类号B81B7/02;H04R19/04;
国家 DE
入库时间 2022-08-21 15:37:12

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