Substrate transfer system and atmospheric transfer module

• 1. 大气传输单元及具有该大气传输单元的晶片传输系统 [P] . 中国专利： CN201812803U . 2011-04-27
• 2. 具备增强光传输模块的基板的增强零件的光传输模块及具备该光传输模块的电子设备 [P] . 中国专利： CN101784933B . 2013.10.30
• 3. Handling system, has handling modules, where substrate handling unit is arranged on one of modules for separate substrate-transfer from carrier that with vertically aligned substrate is transferred between two modules [P] . 德国专利： DE102004039787A1 . 2006-02-23

  机译： 处理系统，具有处理模块，其中基板处理单元布置在模块之一上，用于将与垂直对齐的基板的载体分开的基板传输在两个模块之间进行传输

• 4. SUBSTRATE TRANSFER SYSTEM AND ATMOSPHERIC TRANSFER MODULE [P] . US2021280447A1 . 2021-09-09

  机译： 基板传输系统和大气传输模块

• 5. Atmospheric pressure transfer module for wafer with controlled small environment, method for making atmospheric pressure transfer module [P] . 日本专利： JP4632612B2 . 2011-02-23

  机译： 用于环境受控的晶片的大气压传递模块，制造大气压传递模块的方法

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• 6. Concepts Associated with Transferring Temporal and Spatial Boundary Conditions Between Modules in the Framework for Risk Analysis in Multimedia Environmental Systems (FRAMES) [R] . Whelan, G., Castleton, K. J., Pelton, M. A. 2006

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• 3. Effect of a High Silver Stress on the Element Transfers from a Smectite-Type Clay Substrate to Plants [J] . Khadija Semhi ,Norbert Clauer ,Sam Chaudhuri . 绿色与可持续化学（英文） . 2012,第2期
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