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Evaluation body, evaluation system, manufacturing method of evaluation body, and evaluation method
Evaluation body, evaluation system, manufacturing method of evaluation body, and evaluation method
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机译：评价主体，评价体系，评价主体的制造方法，评价方法
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摘要
To evaluate performance of a one-side polishing device for a wafer accurately at low cost.SOLUTION: An evaluation body 50 for evaluating a polishing state of a wafer under being polished by a one-side polishing device includes: a dummy wafer 51; a sensor S disposed at a non-polished surface of the dummy wafer 51 and measuring a state of the dummy wafer 51; and a deformable pad 54 provided in parts other than the sensor S on the non-polished surface of the dummy wafer 51 and wiring of the sensor S.SELECTED DRAWING: Figure 5
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