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首页> 外文会议>18th International IFHTSE congress >Ti-AI-Si-C-N Hard Coatings Synthesized by Hybrid Arc-Enhanced Magnetron Sputtering
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Ti-AI-Si-C-N Hard Coatings Synthesized by Hybrid Arc-Enhanced Magnetron Sputtering

机译：混合电弧增强磁控溅射制备Ti-Al-Si-C-N硬质涂层

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摘要

Ti-AI-Si-C-N coatings are deposited by hybrid arc-enhanced magnetron sputtering and characterized by various micro and macro-tools. X-ray diffraction, high-resolution transmission electron microscopy, and X-ray photoelectron spectroscopy reveal that the coatings are probably nanocom-posites consisting of nanocrystallites and amorphous phases. They are generally in the form of nc-(Ti,Al)(C,N)/a-SiN/a-C, depending on the composition of the coatings. With increasing Al concentrations, the X-ray diffraction peaks shift to a lower angle and the measured hardness diminishes, implying a reduced contribution of the self-organized stable nanostructure. The dry friction coefficients of the Ti-AI-Si-C-N coatings are about 0.3, which is lower than that of conventional Ti-Si-N coatings. These coatings can find potential applications requiring heavy contact loading subject to high temperature.
机译：Ti-Al-Si-C-N涂层通过混合电弧增强磁控溅射沉积而成，并具有各种微型和宏观工具的特征。 X射线衍射，高分辨率透射电子显微镜和X射线光电子能谱显示涂层可能是由纳米晶体和非晶相组成的纳米复合材料。根据涂层的组成，它们通常为nc-（Ti，Al）（C，N）/ a-SiN / a-C形式。随着Al浓度的增加，X射线衍射峰移动到一个较小的角度，并且测得的硬度减小，这意味着自组织的稳定纳米结构的贡献降低。 Ti-Al-Si-C-N涂层的干摩擦系数约为0.3，低于常规Ti-Si-N涂层的干摩擦系数。这些涂料可以发现潜在的应用，这些应用需要承受高温的重负载。

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  • 来源
    《18th International IFHTSE congress》|2010年|357-368|共12页
  • 会议地点 Rio de Janeiro(BR)
  • 作者

    Guizhi Wu; Sitao Liu; Shengli Ma; Kewei Xu; Vincent Ji; Paul K. Chu;

  • 作者单位

    State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong Univ.,710049 Xi'an, China;

    State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong Univ.,710049 Xi'an, China;

    State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong Univ.,710049 Xi'an, China;

    State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong Univ.,710049 Xi'an, China (Corresponding author);

    ICMMO/LEMHE, Univ. Paris-Sud 11, 91405 Orsay Cedex, France;

    Dept. of Physics and Materials Science, City Univ. of Hong Kong, 83 Tat Chee Avenue,Kowloon, China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Ti-Al-Si-C-N coatings, nanostructure, hardness, friction;

    机译：Ti-Al-Si-C-N涂层，纳米结构，硬度，摩擦;

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