INTEGRATED THERMOPILES FOR INFRARED SENSING

机译：红外综合感测器

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The main goal of this work is to contribute to design, fabrication and characterization of thermoelectrical transducers to promote the development of integrated thermopiles for use as infrared sensors. Thermopiles with 8 and 100 elements were fabricated and preliminary results for their functional characterization show sensors response up to 128 μV/℃ for 8 element thermopiles and 4800 μV/℃ for 100 elements thermopile. The applications of devices based on the Seebeck effect as well as the processes involved in the fabrication of microelectromechanical systems (MEMS) as integrated thermopiles are also reviewed.

机译：这项工作的主要目的是为热电换能器的设计，制造和表征做出贡献，以促进集成热电堆用作红外传感器的发展。制备了具有8和100元素的热电堆，其功能表征的初步结果显示，传感器对8元素热电堆的响应高达128μV/℃，对于100元素热电堆的响应高达4800μV/℃。还回顾了基于塞贝克效应的器件的应用以及作为集成热电堆的微机电系统（MEMS）的制造过程。

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《18th Symposium on Microelectronics Technology and Devices; 16th Symposium on Integrated Circuits and System Design; Sep 8-11, 2003; Sao Paulo, Brazil》|2003年|p.399-405|共7页
会议地点 Sao Paulo(BR);Sao Paulo(BR);Sao Paulo(BR);Sao Paulo(BR)
作者
W. R. Mendes; H. E. M. Peres; F. J. Ramirez-Fernandez;
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作者单位

Sensores Integraveis e Microssistemas (SIM) Departamento de Engenharia de Sistemas Eletronicos (PSI) Escola Politecnica -Universidade de Sao Paulo Av. Prof. Luciano Gualberto, trav. 3, n° 158, CEP 05508-900, Sao Paulo -SP -Brasil;

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正文语种 eng
中图分类无线电电子学、电信技术;
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INTEGRATED THERMOPILES FOR INFRARED SENSING

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