ESD DEFECT LOCALIZATION AND ANALYSIS USING PULSED OBIC TECHNIQUES

机译：ESD缺陷定位和使用脉冲OBIC技术进行分析

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摘要

A method to detect and analyze ESD (Electrostatic Discharge) defects in integrated circuits is presented. This method is based on OBIC (Optical Beam Induced Current). Modeling of the interaction between the laser beam and the circuit has been performed in order to demonstrate the suitability of the technique to analyze the defect.

机译：提出了一种检测和分析集成电路中ESD（静电放电）缺陷的方法。该方法基于OBIC（光束感应电流）。为了证明该技术分析缺陷的适用性，已经对激光束和电路之间的相互作用进行了建模。

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《18th Symposium on Microelectronics Technology and Devices; 16th Symposium on Integrated Circuits and System Design; Sep 8-11, 2003; Sao Paulo, Brazil》|2003年|p.156-165|共10页
会议地点 Sao Paulo(BR);Sao Paulo(BR);Sao Paulo(BR);Sao Paulo(BR)
作者
T. Beauchene; D. Lewis; D. Tremouilles; F. Essely; P. Perdu; P. Fouillat;
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作者单位

Laboratoire IXL, CNRS UMR 5818, Universite Bordeaux 1, 33405 Talence, France;

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原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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专利

1. Optimizing Pulsed OBIC Technique for ESD Defect Localization [J] . Essely F., Guitard N., Darracq F., IEEE transactions on device and materials reliability . 2007,第4期

机译：优化脉冲OBIC技术以实现ESD缺陷定位
2. Thermal laser stimulation and NB-OBIC techniques applied to ESD defect localization [J] . T. Beauchene, D. Lewis, F. Beaudoin, Microelectronics & Reliability . 2003,第3期

机译：热激光刺激和NB-OBIC技术应用于ESD缺陷定位
3. Application of various optical techniques for ESD defect localization [J] . F. Essely, F. Darracq, V. Pouget, Microelectronics & Reliability . 2006,第9a11期

机译：各种光学技术在ESD缺陷定位中的应用
4. Optimizing pulsed OBIC technique for ESD defect localization [C] . Fabien Essely, Nicolas Guitard, Frederic Darracq, . 2006

机译：优化脉冲OBIC技术以进行ESD缺陷定位
5. One-dimensional analysis techniques for pulsed jet flow distribution systems. [D] . Krishnan, Kalyanasundaram. 2005

机译：脉冲射流分配系统的一维分析技术。
6. Thermographic Inspection of Internal Defects in Steel Structures: Analysis of Signal Processing Techniques in Pulsed Thermography [O] . Yoonjae Chung, Ranjit Shrestha, Seungju Lee, 2020

机译：钢结构内缺陷的热敏检查：脉冲热成像信号处理技术分析
7. Optimizing Pulsed OBIC Technique for ESD Defect Localization [O] . Fabien Essely, Nicolas Guitard, Frédéric Darracq, 2013

机译：优化脉冲OBIC技术实现EsD缺陷定位

ESD DEFECT LOCALIZATION AND ANALYSIS USING PULSED OBIC TECHNIQUES

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