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BUBBLE NUCLEATION AND GROWTH ON SURFACE OF RAPIDLY HEATED MICRO HEATERS

机译:快速加热的微型加热器表面的气泡成核和生长

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摘要

Time dependent surface temperatures on a micro heater were measured when a voltage pulse of 25~200 μs was applied to the heater. The dimensions of the micro polysilicon heaters fabricated on a silicon substrate are 50x5x0.523 μm~3 for a micro line heater and 65X65X0.523 μm~3 for a micro square heater. With the minimum voltage needed for bubble growth, the temperature for bubble nucleation on the heater immersed in FC-72 was measured to be 420.7 K for the micro line heater, which is close to the superheat limit of the working fluid. On the other hand a bubble nucleates at temperature of 388 K on the square heater. Bubble nucleation, growth and subsequent collapse process were visualized by a microscope-35 mm camera with a us flash unit.
机译:当在加热器上施加25〜200μs的电压脉冲时,测量随时间变化的表面温度。在硅基板上制造的微型多晶硅加热器的尺寸对于微型线加热器为50x5x0.523μm〜3,对于微型正方形加热器为65X65X0.523μm〜3。在气泡生长所需的最小电压下,对于微型管线加热器,浸入FC-72中的加热器上的气泡成核温度经测量为420.7 K,接近工作流体的过热极限。另一方面,方形加热器上的气泡在388 K的温度下成核。气泡成核,生长和随后的破裂过程通过带有us闪光灯的35毫米显微镜相机进行观察。

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