The analysis of the influence of the auxiliary components on FBAR response

机译：辅助部件对FBAR响应的影响分析

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The future trend for wireless portable products is towards integration, size and cost reduction. With MEMS technologies, the thin film bulk acoustic wave resonator (FBAR) filters have the potentials to help fulfill these gpals. To further improve the performance of FBAR devices, auxiliary components such as inductors and capacitors are often used. This paper will discuss the effects of such components on the resonance frequency of FBAR and discuss the design of FBAR filters from a circuit viewpoint systematically. Based on ladder type filer and possible number and placements of auxiliary component, the impedance and S-parameter frequency responses can also be analyzed. The simulation results can help optimize the performance of filter or duplexer. The discussion and conclusion would be very helpful to the implementation of FBAR filter and duplexer.

机译：无线便携式产品的未来趋势是朝着集成，尺寸和成本降低的方向发展。借助MEMS技术，薄膜体声波谐振器（FBAR）滤波器具有帮助实现这些gpal的潜力。为了进一步提高FBAR器件的性能，经常使用辅助组件，例如电感器和电容器。本文将讨论这些元件对FBAR谐振频率的影响，并从电路角度系统地讨论FBAR滤波器的设计。根据梯形滤波器和辅助部件的可能数量和放置位置，还可以分析阻抗和S参数频率响应。仿真结果可以帮助优化滤波器或双工器的性能。讨论和结论将对FBAR滤波器和双工器的实现非常有帮助。

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《2003 Nanotechnology Conference and Trade Show Nanotech 2003 Vol.1 Feb 23-27, 2003 California, USA》|2003年|p.348-351|共4页
会议地点 San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US)
作者
T. K. Shing; C. H. Tai; Y. D. Lee; C. C. Tien;
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作者单位

Material Research Lab, Industrial Technology Research Institute Rm 409, Bldg. 77, 195 Chung Hsing Rd. Sec. #4, Chutung, HsinChu, Taiwan 310, ROC;

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会议组织
原文格式 PDF
正文语种 eng
中图分类一般工业技术;
关键词
thin film bulk acoustic wave resonator; wireless; filter;

机译：薄膜体声波谐振器;无线;滤波器;

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The analysis of the influence of the auxiliary components on FBAR response

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