Design and Simulation of a MicroEIectroMechanical Resonator Oscillator

机译：微型机电谐振器的设计与仿真

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In this paper a design of 458 kHz oscillator is simulated and prepared for implementation by properly adjusting the physical dimensions of the micromechanical resonator. The Dimensions of the resonator is tuned to achieve higher resonance frequencies. Electrical model and governing equations of interdigitated finger structure are studied. Based on results of these studies a micromechanical oscillator is designed to attain abovementioned frequency. The study is carried out both analytically and on the equivalent circuit.

机译：本文对458 kHz振荡器的设计进行了仿真，并准备通过适当调整微机械谐振器的物理尺寸来实现。调整谐振器的尺寸以获得更高的谐振频率。研究了指指结构的电气模型和控制方程。基于这些研究的结果，设计了一种微机械振荡器来达到上述频率。该研究是在分析电路和等效电路上进行的。

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来源
《2003 Nanotechnology Conference and Trade Show Nanotech 2003 Vol.1 Feb 23-27, 2003 California, USA》|2003年|p.408-411|共4页
会议地点 San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US)
作者
M. Parlak; M. Naseer; Y. Gurbuz;
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作者单位

Sabanci University, Orhanli, Tuzla, 34956, Istanbul, Turkey;

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会议组织
原文格式 PDF
正文语种 eng
中图分类一般工业技术;
关键词
oscillator; microelectromechanical sytems (MEMS); resonator;

机译：振荡器;微机电系统（MEMS）;谐振器;

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Design and Simulation of a MicroEIectroMechanical Resonator Oscillator

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