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首页> 外文会议>2003 Nanotechnology Conference and Trade Show Nanotech 2003 Vol.3 Feb 23-27, 2003 California, USA >Effects of Electric Field on the Growth of One-dimensional Carbon Materials in the Chemical Vapor Deposition Process
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Effects of Electric Field on the Growth of One-dimensional Carbon Materials in the Chemical Vapor Deposition Process

机译：电场对化学气相沉积过程中一维碳材料生长的影响

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摘要

In this study, Si wafer coated with sputtered Fe_(0.8)Co_(0.2) alloy was adopted as the substrate which was placed in a tube furnace for the growth of Carbon NanoTubes (CNTs) and Carbon nanofibers (CNFs). Methane mixed with hydrogen and argon was used as gaseous p recursor for c arbon d eposition. In o rder t o obtain aligned array of carbon nanotubes, an electric filed was applied on the wafer. Effects of pressure, gap distance of the electrode, applied voltage, concentration and flow rate of the reactant, and deposition period on the growth of the aligned carbon nanotubes and fibers were investigated. Moreover, the field emitting properties of the as-fabricated CNTs and CNFs were measured and the morphologies were examined.
机译：在本研究中，采用涂覆有溅射Fe_（0.8）Co_（0.2）合金的Si晶片作为衬底，将其放置在管式炉中以生长碳纳米管（CNTs）和碳纳米纤维（CNFs）。甲烷与氢气和氩气混合用作碳沉积的气态前驱物。为了获得碳纳米管的排列阵列，在晶片上施加电场。研究了压力，电极的间隙距离，施加的电压，反应物的浓度和流速以及沉积时间对排列的碳纳米管和纤维生长的影响。此外，测量了所制造的CNT和CNF的场发射性质，并检查了其形态。

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