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首页> 外文会议>2005 IMAPS/ACerS 1st international conference and exhibition on ceramic interconnect and ceramic microsystems technologies (CICMT) >LTCC Phase shifter modules for RF-MEMS-switch integration
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LTCC Phase shifter modules for RF-MEMS-switch integration

机译：用于RF-MEMS开关集成的LTCC移相器模块

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摘要

The European IST project ARHMS is covering a wide field of R&D activities with the final goal: arnsatellite based car communication system with a flat electronically steerable roof antenna based on RF-MEMS.rnThe required phase shift for beam steering will be done with MEMS switches and RF networks. An integratablernLTCC packaging and wiring module with the MEMS and the passives has to be placed and connected close tornthe patch antenna.rnLTCC as a ceramic interconnection technology for processing multilayer boards, multi-chip-modulesrnand packages, enables increased circuit density and high reliable structures. Within this work the goodrnintegration opportunities and the low loss of LTCC were reasons for the choice as well as thermal conductivityrnand the possibility to build cavities and windows, to integrate the RF-switches and SMDs and to guide the RFrnsignal in a power range around 5 watt (Tx).rnInitial material studies and investigation, simulations of the RF conditions, technology improvements inrnstructuring and processing LTCC as well as numerous test runs and measurements had been done to develop anrninitial test substrate. These early test structures were used to verify the design and simulation surrounding. Thernextracted correlation data allow the most promising layout work.
机译：欧洲IST项目ARHMS的最终目标是覆盖广泛的研发活动：基于arnsatellite的汽车通信系统，带有基于RF-MEMS的扁平电子可控顶天线。rn波束转向所需的相移将通过MEMS开关和射频网络。必须将带有MEMS和无源元件的可集成LTCC封装和布线模块靠近贴片天线放置并连接。LTCC作为用于处理多层板，多芯片模块和封装的陶瓷互连技术，可以提高电路密度和高度可靠的结构。在这项工作中，良好的集成机会和LTCC的低损耗是选择以及导热系数的原因，并且是建造空腔和窗口，集成RF开关和SMD以及在5瓦左右功率范围内引导RF信号的原因（Tx）.rn已经进行了初始材料研究和调查，RF条件的模拟，LTCC的技术改进，结构化和加工技术以及众多测试运行和测量，以开发出初始测试基板。这些早期的测试结构用于验证设计和仿真环境。提取的相关数据允许最有前途的布局工作。

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