Here we present a high performance 3D MEMS ultrasound transducer technology called Clarinet™ based on a combination of micromachined dome-shaped piezoelectric resonators arranged in a flexible architecture. In a drastic departure from typical PMUT membranes, our high performance PZNT thin film is integrated into a 3D dome-shaped membrane as the transducer's building block. Three different types of ultrasound array are presented as an example of this flexible architecture in which the frequency response has been tailored by mixing these basic cells and modifying their dimensions by lithography. These demonstrate customizable performance capabilities such as an acoustic intensity up to 300W/cm2, one-way insertion loss as low as −4.2dB, and ultra wide-bandwidth suitable for both therapeutic and imaging applications. In addition, low electrical impedance, and a low operating voltage compatible with ordinary integrated circuitry are characteristics of all the designs.
展开▼
机译：在这里，我们介绍一种基于Clarinet™的高性能3D MEMS超声换能器技术，该技术基于以柔性结构布置的微机械圆顶形压电谐振器的组合。与典型的PMUT膜大相径庭，我们的高性能PZNT薄膜已集成到3D圆顶形膜中，作为传感器的基础。提出了三种不同类型的超声阵列作为这种灵活架构的示例，其中通过混合这些基本单元并通过光刻修改其尺寸来定制频率响应。这些演示了可定制的性能，例如高达300W / cm 2 的声强，低至-4.2dB的单向插入损耗以及适用于治疗和成像应用的超宽带。此外，所有设计均具有低电阻抗和与普通集成电路兼容的低工作电压。
展开▼
