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The Novel Approach for Multi-layered Thin Film Inspection Based on 3D Surface Reconstruction

机译:基于3D表面重构的多层薄膜检测新方法

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摘要

Currently, thin films are widely used for the display product. Furthermore, the protective film is often attached to touch films and cover glasses for their safety. However, relatively few researches have been done for those products and there are many issues when we use current inspection system for multi-layered thin films. In this paper, we propose the novel method to inspect them based on 3d surface reconstruction. We use line profiles of each layer which composes the multi-layered thin film. Also an enhanced light source system is applied to inspect user specified layers by using the patterned retarder. Also we propose the robust defect analysis system by using user specified depth images. We made 3d inspection platform which shows very stable results regarding defects detection among layers. Finally, our study is applied to the commercial system which is used for visual inspection of the film.
机译:当前,薄膜被广泛用于显示产品。此外,为了安全起见,保护膜通常附着在触摸膜和防护玻璃上。但是,对于这些产品的研究相对较少,当我们将当前的检查系统用于多层薄膜时存在很多问题。在本文中,我们提出了一种基于3d表面重建的新颖方法来检查它们。我们使用组成多层薄膜的每一层的线轮廓。还通过使用图案化的延迟器将增强的光源系统应用于检查用户指定的层。我们还通过使用用户指定的深度图像提出了鲁棒的缺陷分析系统。我们制作了3d检查平台,该平台显示出关于层间缺陷检测的非常稳定的结果。最后,我们的研究被应用到用于视觉检查胶片的商业系统。

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